The WNP32 series Z-direction/pitch/deflection mirror provides two axes of high-speed precise deflection motion and Z-axis linear movement. The resolution of linear motion can reach sub-nanometer level, the resolution of deflection can reach sub-microradian level, and the response time can reach millisecond order. WNP32 series piezoelectric deflector is compact in size and structure, which can achieve a maximum deflection of 6mrAD and a linear movement of 40um in Z-axis.

 

The characteristics of

●θX, θY deflection, Z axis up and down

● Maximum deflection range of 6MRAD

● Response time of milliseconds

● High precision of closed loop positioning

● High temperature stability

 

Typical applications

● Image processing and stabilization

● Optical capture

● Laser scanning and beam deflection

● Laser tuning

● Optical filter/optical switch

● Optical/beam stabilization.

 

High resolution, high stability and dynamic

The WNP32 piezoelectric deflector is compact and internally assembled with preloaded, highly reliable piezoelectric actuators integrated in a complex, FEA modeling and analysis flexible hinge steering system. Piezoelectric actuators are stacked co-fired piezoelectric ceramics, which provide better performance and reliability than traditional piezoelectric actuators.

The WNP32 piezoelectric deflector is ideally suited for industrial applications by employing a direct drive PZT tripod structure based on parallel kinematics that operates over billions of motion cycles without failure or performance degradation.

The tripod structure is designed to provide optimal angular stability over a wide range of temperatures. This design has the advantages of smaller size, the same size and dynamic performance of the two axes, faster response speed and better linearity, and also prevents polarization rotation.

 

Model

End with S- closed loop

End with K- open loop

WNP32.ZT4S

WNP32.ZT4K

Unit

Freedom of motion     θX, θY、Z

θX, θY Nominal travel range (0~120V)

5(≈ 1030 seconds)

mrad±20%

Z  Nominal travel range (0~120V)

30

um±20%

θX, θY Maximum travel range (-20~150V)

6(≈1240 seconds)

mrad±20%

Z Maximum travel range (-20~150V)

10

um±20%

Sensor Type

SGS/-

Closed/open loopθX, θY resolution

0.1(≈0.02 seconds）/0.05(≈0.01 seconds)

urad

Closed/open loop Z  resolution

1/0.5

nm

Closed loop linearity

0.05/-

%F.S.

Closed loop repeated positioning accuracy

0.02/-

%F.S.

No load resonant frequencyθX, θY

2

kHz±20%

Closed/open loop no-load step time

5/2

ms±20%

A closed-loop light

Working frequency

10% of the trip

500

Hz±20%

100% of the trip

40

The electrostatic capacity

3.6/axis

uF±20%

The material

steel

The weight

350

g±5%