WN90 series 6-DOF parallel mechanism, is θx, θy, θz, x, y, z six-axis motion table, through the coordinated expansion of six piezoelectric actuators to realize the movement of six degrees of freedom in the space, the table structure is compact, three kinds of specifications and models are available for selection, closed-loop model positioning accuracy is high, It is the first choice for six degrees of freedom microoperation, microelectronics precision machining and other applications.
The characteristics of
● Six axes θx, θy, θz, x, y, z
● High precision of closed loop positioning
● Ultra-small coupling
● No accumulation of errors
|
model
|
End with S- closed loop
End with K- open loop |
WN90.XYZTR1S
WN90.XYZTR1K |
WN90.XYZTR2S
WN90.XYZTR2K |
WN90.XYZTR5S
WN90.XYZTR5K |
unit |
|
Freedom of motion X,Y,Z,θx,θy,θz |
|
|
Nominal travel range of X and Y axis (0~ 120V) |
±6.5 |
±12.5 |
±25 |
μm±20% |
|
Nominal travel range of Z axis (0~120V) |
±3.2 |
±6.4 |
±12.8 |
μm±20% |
|
Deviation Angle range of θx,θy axis (0~120V) |
±0.16( ±30second) |
±0.32( ±70second) |
±0.64( ±130second) |
mrad±20% |
|
θ Z axis rotation Angle range (0~120V) |
±0.24(±50second) |
±0.48 (±100second) |
±0.96(±200second) |
mrad±20% |
|
Closed/open loop θx,θy axis skew resolution |
0.02 ( <0.01second) |
0.04 (<0.01second) |
0.08 (≈0.01second)
0.04(<0.01second) |
μrad |
|
0.01 (<0.01second) |
0.02 (<0.01second) |
|
Closed/open loop θ z-axis skew resolution
|
0.04 ( <0.01second)
0.02 (<0.01second) |
0.06 (≈ 0.01second)
0.03 ( <0.01second) |
0.12(≈0.02second)
0.06 ( ≈0.01second) |
urad |
|
Closed/open loop X and Y axis displacement resolution |
0.8/0.4 |
1.6/0.8 |
3.2/1.6 |
nm |
|
Closed/open loop Z-axis displacement resolution |
0.4/0.2 |
0.8/0.4 |
1.6/0.8 |
nm |
|
stiffness |
50 |
58 |
66 |
N/um±20% |
|
Closed loop linearity |
0.25/- |
0.25/- |
0.25/- |
%F.S. |
|
Closed loop repeated positioning accuracy |
0.1/- |
0.1/- |
0.1/- |
%F.S. |
|
No load resonant frequency |
1 |
kHz±5% |
|
Structure form |
Six-degree-of-freedom parallel type |
|
Drive way |
Piezoelectric ceramic actuator drive |
|
Maximum load |
5 |
kg |
|
weight |
1000 |
1150 |
1300 |
g±5% |
|