Main features:
 
1. A new omni-directional angular ion collector can collect almost all reflected ions in a specific area of the sample surface.
 
2. Ultra-high surface sensitivity, and the information depth is generally within 3 atomic layers.
 
3. Good quantitative characteristics.
 
4. The ion source can switch between high beam mode and analysis mode, and can clean and sputter samples.
 
5. Automatic vacuum system and perfect interlocking device make the operation simpler.
 
6. Quantitative analysis of topmost atoms.
 
 
Low energy ion scattering spectroscopy (LEIS) is characterized by its high surface sensitivity and good quantification. Compared with other common surface analysis methods, such as XPS and AES, its biggest feature is that it can reduce the information depth to the thickness of monatomic layer. Combined with depth analysis, many kinds of measurements can be realized, such as imaging the composition distribution of surface monatomic layer, and the composition change in the depth direction of samples.