Product specification detection element range WDS: (Be) * 1/B ~ U, EDS: B ~ UX-ray detection range WDS detection wavelength range: 0.087 ~ 9.3 nm, energy range of EDS EDS: 20keV, number of spectrometers, WDS: 1 ~ 5 channels, EDS: 1 set, zui large sample size 100mm × 100mm × 50mm (h), acceleration voltage 0.2 ~ 30kV (with 0.1 kV as step size), beam current range 10-12 ~ 10-5 A, beam current stability 5%/h, + 0.3%/12h (W), secondary electron resolution 6nm (W), 5nm (LaB6) * 2 (W.D.11mm, 30kV), scanning magnification × 40 ~ × 300, 000 (W.D.11mm), scanning image resolution zui large 5, 120 × 3, 840 color display for EPMA analysis: LCD 1, 280 × 1, 024 SEM Operation, for EDS analysis: LCD 1,280 × 1,024*1: optional spectroscopic crystal for Be analysis is required. * 2: LaB6 is optional.