Product characteristics
 
 
Using deuterium lamp and halogen lamp composite light source, the spectrum covers ultraviolet to near infrared range (193-2500nm);
It can realize Mueller matrix data processing, with larger measurement information, faster measurement speed and more accurate data;
Based on the configuration of double rotating compensators, 16 elements of the full Mueller matrix can be measured at one time, and more abundant and comprehensive measurement information can be obtained compared with the traditional spectral ellipsometer
Yiguang patented technology ensures that it provides high-quality and stable spectra in various bands in a wide spectral range;
Hundreds of material databases and various algorithm model libraries cover most photoelectric materials at present;
Integrating the analysis of nano-grating, it can measure and analyze the geometric morphology information of nano-structure such as period, line width, line height, sidewall angle and roughness at the same time;