Product characteristics
 
Series products are mainly aimed at heat treatment of samples under vacuum or protective atmosphere, high-quality furnace materials and stable temperature control system, which can ensure the reliability of experimental data; The product adopts new ceramic fiber material as furnace material, and the furnace tube is made of excellent material. The stainless steel flange at both ends of the furnace tube is sealed, which can work under vacuum. There are air inlet and air outlet on the flange, which can introduce protective gas. The precision needle valve can adjust the air inlet flow.
 
1. The CVD tube furnace system consists of heating system, vacuum obtaining system and gas path system.
 
2. The tubular furnace can choose different pipe diameters and the length of constant temperature zone, and the stainless steel sealing flanges at both ends of the furnace tube can also choose high vacuum flanges and low vacuum flanges;
 
3. The vacuum acquisition system can select different vacuum pumps according to the test requirements, the vacuum degree of rotary vane mechanical vacuum pump is ≤ 5pa, and the vacuum degree of molecular pump vacuum unit is 1 × 10-4pa;
 
4. The air supply system can choose 3-way float manual and 3-way automatic mass flow system.
 
5. Vacuum measurement is used as a digital compound vacuum machine or Pirani vacuum gauge.
 
6. The RS485 digital communication port and USB adapter built in the thermostat are optional configurations, which can be connected to PC for remote control and monitoring of the system, and can also save or export test results.