1) High resolution lithography to 1um level; 2) A variety of mask plates can be used, small size ~ 4 inches can be used; Again large size, you can customize the service. 3) Special base chuck can be customized; 4) A high-precision alignment table and a microscope manipulator; 5) High intensity optical devices for different ultraviolet exposures; 6) Air azimuth system for wedge compensation; 7) All parts are accessible; 8) Ergonomic operation; 9) Low cost and high quality;
|