Product characteristics:
Vibration isolation starts at 0.6 Hz, and can be isolated by 40% to 70% at 1Hz
Provide more than 90% vibration isolation in height, horizontal and vertical directions at 2Hz
Reduce the cost of factory floor laying, so that the equipment can be installed in a strong vibration environment
Active bandwidth: 0. 6Hz to 150Hz
Six-degree-of-freedom movable rigid base design without air bearing support
Robust control system without pre-adjustment
Compatible with built-in vibration isolation system of equipment
Ensure that equipment meets its own vibration standards as ambient vibration levels increase over time
Vibration elimination by piezoelectric ceramic actuator using Stacis technology of micro-nano optics
Digital controller with computer-based graphical user interface (GUI)
It can also be installed and used on old and noisy floors
Compatible with all kinds of floor heights and types
Pay attention to the active air flotation vibration isolation performance of micro-nano optical technology and provide comprehensive after-sales service
 
Active air-bearing vibration isolation system is the most advanced active vibration isolation system. Using advanced inertial vibration sensors, complex control algorithms and state-of-the-art piezoelectric actuators, STACIS performs real-time vibration isolation by continuously measuring floor activity, expanding and contracting piezoelectric actuators to filter floor vibration.
Originally designed for vibration isolation of precision microlithography, metering and testing equipment in advanced semiconductor factories, STACIS is now an industry standard solution for sensitive instruments in noisy environments. It is widely used in semiconductor fab, failure analysis laboratory, nanotechnology research, nano-processing equipment and materials research.
The active air-bearing vibration isolator includes a new and improved digital controller-DC-2020. With the latest and efficient dual-core processor front and rear panels, both equipped with Ethernet and USB serial ports, the new advanced control system provides users with a modern and easy-to-use graphical user interface (GUI).
Active air-bearing vibration isolation system has been successfully installed in hundreds of cases all over the world, and is the most ideal vibration elimination system for most vibration sensitive instruments.
 
Advantages of Active Air Flotation Vibration Isolation System
STACIS is more robust and reliable than air-bearing legs, and does not have the limitation that air-bearing vibration isolation system cannot be separated from air source. It has no air-bearing support, and unlike active air-bearing system, STACIS can be placed under equipment with internal active air isolation system, and the two vibration isolation systems are compatible with each other.
Designed with a unique communication serial port and proprietary hi gh-force piezoelectric technology, it has a large active bandwidth of 0.6 Hz to 150 Hz, and active vibration cancellation performance of up to 90% from 2Hz.