Product characteristics: Adopt unique patented active vibration isolation technology Optional VCM feedforward and/or feedback Piezoelectric actuator with high force and longer stroke Active vibration isolation starting at 0.6 Hz The position repeatability of payload is within microns Fast stabilization time in response to platform motion Frame installation design. Suspension without soft air 6 active degrees of freedom Simple, robust and cost-effective Realization of High Speed Digital Controller Based on PC Graphical User Interface (GUI) by USB 2.0 Micro-nano Optics continues to develop new solutions based on advanced technologies to meet the challenging requirements of semiconductor tools for their vibration isolation systems. Active vibration isolation system of hybrid piezoelectric ceramics/voice coil motor is the main vibration isolation system specially designed for advanced semiconductor tools with high-precision electric X-Y platform. These tools not only need extremely effective vibration suppression performance. They also require that the payload motion caused by the platform can be stabilized very quickly. To maximize tool throughput. By adding VCM with feedforward control, the stabilization time can be shortened. Further improve throughput. Thereby providing the most advanced active vibration and motion elimination system for mobile platform applications. |
