Product features:

Compact structure, small and light, ultra-thin

Manual automatic integrated inflation

Self-horizontal structure

Sensitive response, stable operation and pressure display

High strength aluminum alloy honeycomb structure mesa

Large bearing capacity

Applications:

Junction microscope, electron microscope

Roundness meter

Small optical equipment

Instruments and equipment with high requirements for vibration.

 

 

The table-type vibration isolation platform is designed and manufactured with hard aluminum alloy as a whole. The ultra-thin rubber air spring independently developed by Micro-Nano Optics is installed inside. The pneumatic control system adopts German FEST0 components. The table-type platform can be inflated by itself. There are two modes of inflation: one is automatic inflation and manual leveling, and the other is mechanical inflation and manual leveling; The panel is bonded with honeycomb aluminum plate, which has high stiffness and light weight.

 

Natural frequency

Vertical: 1.5-3.0 Hz Horizontal: 1.5-3. OHz

Vibration isolation mode

Air spring vibration isolation rubber

Leveling mode

Automatic leveling

Damping mode

Multi-orifice air damping

Work pressure

0.2-0.4 MPa

Platform size

600mm x 500mm x 75mm 800mm x 600mm x 97mm

Dead weight

25kg, 10kg-50kg; 44kg, 20kg-100kg;

Repeated positioning accuracy

0.1 mm

Flatness of platen

0.1 mm/m2 

Platen roughness

0.8 um, surface matted