Typical applications: Precision manufacturing, metrological testing, deformation monitoring, microscopy, material testing, vibration detection.
 
The measured object and the sensor are respectively used as a flat electrode. By giving the sensor a continuous and stable AC signal, the amplitude change of its voltage is proportional to the distance between the sensor and the measured object. After the AC signal is demodulated, the displacement can be measured. Capacitive displacement sensor has the characteristics of high signal-to-noise ratio, high sensitivity, wide frequency response, small nonlinearity, good precision stability and no loss.

 

Model
WN-DCS06L -20
WN-DCS06L -100
WN-DCS06L -200
Range (UM)
20
100
200
Resolution RMS (nmHz-1/2)
<0.05
<0.08
<0.10
Linearity (%)
0.1
0.15
0.2
Sensor effective area (mm2)
5
5
5
Bandwidth (kHz)
10
10
10
Operating temperature range ()
0~50
0~50
0~50
Voltage Output Range (V)
-10~10/-5~5/0~ 10
-10~10/-5~5/0~ 10
-10~ 10/-5~5/0~ 10
Supply voltage (V)
±15
±15
±15
Sensor line length (M)
2
2
2
Sensor material
AL/lnvar
AL/lnvar
AL/lnvar