The P78 piezo scanner is a 1D Z-axis piezo scanner designed for sample microscopic scanning in biomedical applications. Its shape structure is easy to integrate into microscopy equipment.

 

The characteristics of

● Travel range 110/210/300um optional

●Z resolution up to 3nm

● Through hole size is 120x70 or 64x64mm

● One-dimensional Z-direction motion

 

application

Microscopic imaging, biotechnology, super-resolution microscopy, optical disc microscopy, confocal microscopy, 3D imaging, screening, interferometry, measurement techniques, autofocusing systems, semiconductor testing, etc.

The P78 PIEZOELECTRIC scanning platform is ideal for nanoscale alignment, nanofocus, measurement and other applications. The closed-loop sensor with bridge configuration is optional, which can eliminate the temperature drift and ensure the positioning stability in nanometer range. At the same time, the straightness and flatness are optimized by FEA, which provides high stiffness in the direction of motion and vertical motion. Parallel kinematic design makes its structure more compact and response speed faster.

 

Large hole, large displacement, high resolution, high precision

P78 series piezoelectric scanning platform, using the mechanism amplification design principle, can achieve the Z-axis 110um, 210μm or 300um displacement stroke. The excellent flexure hinge steering mechanism is optimized using finite element analysis to achieve nanoscale resolution and millisecond resolution

Response time.

P78 series piezoelectric scanning platform can optionally be equipped with closed-loop sensor to realize real-time monitoring of displacement and feedback to the closed-loop piezoelectric controller to realize nano-level precision control. The central through-hole size of the scanning platform is 120x 70mm or 64x 64mm, suitable for interference, scanning, surface inspection and other applications.

 

 

Model

S- closed loop

K- open loop

P78.Z100S-D1

P78.Z100K-D1

P78.Z200S

P78.Z200K

P78.Z300S

P78.Z300K

Unit

Freedom of motion     Z

travel range (0~+120V)

80

150

210

μm±20%

travel range (-20~+150V)

110

210

300

μm±20%

Sensor Type

SGS/-

SGS/-

SGS/-

 

hole size

120x70

64x64

64x64

mm

Closed/open loop resolution

7/4

7/3

10/5

nm

Closed loop linearity

0.2/-

0.1/-

0.15/-

%F.S.

Closed loop repeated positioning accuracy

0.1/-

0.05/-

0.1/-

%F.S.

Pitch/yaw/roll

<25

<20

<30

 

push/pull in direction of motion

120/15

50/8

30/5

N

Stiffness in direction of motion

1.5

0.35

0.15

N/μm±20%

No load resonant frequency

200

270

200

Hz±20%

Closed/open loop no-load step time

30/5

15/3.2

50/3.2

ms

Closed loop no-load operating frequency

10% of the trip

50

80

30

Hz±20%

100% of the trip

15

15

5

Maximum load

1

1

0.5

KG

The electrostatic capacity

5.4

7.2

14.4

uF±20%

Operating temperature range

-20~80

-20~80

-20~80

℃

material

Steel, aluminum

aluminum

aluminum

 

weight

560

340

340

g±5%

Line length

1.5

1.5

1.5

m±10mm

Sensing/voltage connector

LEMO

LEMO

LEMO