The Z axis of the moving mechanism of the large-format and high-power measurement system realizes automatic focusing of the microscope, the XY axis moves quickly to the measured area, and the microscope realizes continuous multi-multiple transformation, thus realizing high-precision observation and measurement of large-area objects.
X-axis stroke: 800mm, resolution accuracy 0.5 μ m;
Y axis stroke: 600mm, resolution accuracy 0.5 μ m;
Z-axis stroke: 150mm, resolution accuracy 0.1 μ m; Load 20kg;
Microscope objective: 5X, 10X, 20X, 40X, 100X