Product features：
1. Ultra-thin platform with epoch-making module structure: a sliding table group and a special cross wave column bearing are installed between the base and the worktable to realize the ultra-thin structure.
2. High rigidity and high precision: high-quality precision grinding level wave bead screw drive, small lead, and the same subdivision can achieve high resolution level and high repeated positioning accuracy.
3. Ultra-thin, lightweight and hollow structure: hollow structure design, which can be used as optical inspection device or conduction tester
4. Lubrication system: Add lubrication system in various motion tracks to improve the service life and accuracy of alignment platform.
5. The whole mechanism of the product is thin and light, and the internal structure is compact, which can realize the translation of X axis, the translation of Y axis and the rotation of B axis at the same time. It can realize re-movement at any position.
6. The materials are treated by ultra-cryogenic treatment, which effectively prevents deformation and greatly prolongs the service life
Product application:
Panel film
3D screen printing
Glass side angle and edging equipment
Wafe alignment equipment
P.C.D Exposure Equipment
Software cutting equipment
Semiconductor equipment
|
Model |
WNUVW160LC |
|
Structure description |
Table Size (mm) |
160*160 |
|
base size(mm) |
170*170 |
|
height(mm) |
50 |
|
Travel Range(mm) |
±3 |
|
Angle(Ø) |
±2° |
|
Base Material |
Aluminum Alloy |
|
Surface Treatment |
Black-anodized |
|
motor type |
28 stepper motor |
|
Accuracy description |
Screw specification |
Φ6-P1 |
|
Horizontal load capacity(kgf) |
30 |
|
Repeatability(μm) |
±2 |
|
Parallelism(μm) |
25 |
|
