The Dilase 250 is a desktop precision laser direct writing device ideal for fast proofing lithographic mask processing and micromachining applications. Dilase 250 adopts the optical path design developed by KLOE Company, which has a large focusing depth of field. This design is supplemented by automatic control absolute reference standard, which ensures good direct accuracy and repeatability without setting autofocus.
 
We focus on core technologies:
 
Laser source:
 
The wavelength of Dilase 250 laser source can be configured at 375nm or 405nm, thus satisfying the direct writing application of most commercial photoresists in the market. The whole optical path system of Dilase 250, including laser probe, is fixed, which ensures the stability and reliability of the equipment in the working process.
 
Laser spot focusing system
 
Using optical tube technology, the light source is filtered, homogenized and focused to form a direct writing spot, which realizes high-precision laser direct writing.
 
Sample table
 
The sample stage uses this precision displacement stage to drive the sample to move according to the graphics set by the software. In this process, the laser head keeps in a fixed position, and the direct writing with large size, high precision and no stitching graphics is realized.
 
Technical features:
 
1. Large visual window
 
Dilase 250 is equipped with a large visual window, which can visually observe the whole working process; At the same time, the window is also convenient for operators to complete loading and unloading.
 
2. Machining of high aspect ratio structure
 
Dilase 250's unique focusing optical path design makes it easy to process microstructures with an aspect ratio of 20: 1, and can be customized to meet the requirement of 50: 1 aspect ratio structure processing.
 
3. Area: 100mm*100mm
 
The precision displacement table equipped with the equipment meets the direct writing of 100mm*100mm size samples, and the displacement table is placed on the marble table top with shockproof design to ensure the stability of the equipment.
 
4. Laser source
 
High stability solid-state laser with wavelength of 375nm or 405nm is adopted, and its working life is more than 10000 hours without preheating and waiting.
 
5. Friendly operating system
 
In terms of hardware, the equipment is equipped with a computer pre-installed with direct writing software. The equipment is equipped with a main switch and an emergency stop switch, and the operation window is equipped with a safety sensor. The laser will only be turned on when the operation window is closed, thus ensuring the safety of operators.
 
The device is pre-installed with DilaseSoft direct writing software, compatible with LWO, GDS2, DXF format files.
 
6. Different direct writing modes achieve both high speed and high precision
 
Dilase 250 is a laser direct writing device with three direct writing modes on the market, namely scan mode, vector mode and scan + vector mode, which achieve both high speed and high precision.
 
Performance parameters:
 
Resolution: 100nm
 
Linear direct writing speed: > 100mm. s-1
 
Displacement accuracy of sample table: 100nm standard 40nm optional
 
Repeatability error: 100nm
 
Multi-layer alignment accuracy: 1 μ m
 
Positioning accuracy: 3 μ m/100mm
 
Direct writing accuracy: 100nm +/-3 μ m
 
Orthogonality: < 1mRad
 
Laser source
 
Wavelength: 375nm or 405nm
 
Laser spot: 1um-50um optional
 
Sample stage:
 
Sample size: From 3x 3mm to 4 "Up to 5" for square
 
Area: 100mm * 100mm
 
Sample thickness: 250um-5mm