Principle
 
Nano-scale 3D optical interferometry system VS1800 uses optical interference phenomenon to measure fine surface topography, which can realize high-precision measurement required by high-performance thin films, semiconductors, automobile spare parts, displays and other industries. Moreover, the layer structure of the multilayer film and the measurement of foreign matter inside the layer can be carried out in a non-invasive manner.
 
Main features:
 
Adopt optical interference mode and non-contact measurement
 
3D measurement supports line roughness and surface roughness measurement
 
Automatic Roughness Parameter Selection (ISO25178)
 
Millimeter scale large area measurement
 
High precision measurement (vertical resolution 0.01 nm)
 
Fast and highly reproducible measurement
 
Analysis of multilayer thin films and defects in inner layers of thin films