Product Description:
FS-Pro series is an integrated semiconductor parameter test system driven by artificial intelligence in the industry. A single device has IV, CV and 1/f noise test capabilities, and the built-in AI algorithm acceleration technology improves the test efficiency in an all-round way. The integration of industry low frequency noise test gold system 9812DX and FS-Pro makes the two products not only more complete in function, but also greatly improve in performance.
FS-Pro can be widely used in typical semiconductor devices, LED materials, two-dimensional devices, metal materials, new advanced materials and device testing. FS-Pro can support hundreds of channels. Built-in measurement software provides hundreds of predefined test templates and functions to realize plug and play experience.
Based on its outstanding performance in production line testing and scientific research application, FS-Pro has not only been adopted by many leading design companies and semiconductor foundries, IDM and design companies in the world, but also widely recognized in academia and adopted by dozens of universities and research institutions.
Product advantage
Integration: The industry integrates IV test, CV test and low frequency noise (1/f noise) into a single instrument, and can complete all low frequency parametric characterization without changing lines and updating connections.
Ultra-fast: Compared with the traditional semiconductor parameter test system, FS-Pro series has a test speed as high as 10 times. The industry pioneered AI test accelerator card, which experienced powerful speed improvement while maintaining test accuracy.
Modular architecture: PXI modular architecture can be easily extended to support production testing (such as WAT), supplemented by its high speed and complete features, which can greatly accelerate production testing.
Easy to operate: Built-in measurement control software LabExpress ™ has an intuitive graphical user interface, and can complete powerful device characteristic analysis function with only a few clicks of the mouse. Optional industrial-grade test software FastLab supports industrial test requirements such as automatic probe station, third-party instruments, SRAM and reliability test.
Wide range: up to 200V, 1A (pulse 3A), 0.1 fA sensitivity.
Modeling and simulation: Built-in device modeling and simulation software (BSIMProPlus/MeQLab/NanoSpice) can be selected to form a test, modeling and simulation system.
Product application
It can be used to test typical semiconductor devices, LED materials, two-dimensional devices, metal materials, new advanced materials and devices. FS-Pro can support hundreds of channels. Built-in measurement software provides hundreds of predefined test templates and functions to realize plug and play experience.
IV Current and Voltage Test.
CV Capacitor Voltage Test.
1/f noise low frequency noise test.
Pulse pulse generation.
IV-T mode with high sampling rate.
Product index
IV Current and Voltage Test
High precision parameter measurement, voltage 200V, resolution 0.1 fA, current measurement accuracy 30fA, DC current 1A, pulse current 3A.
IV-T mode with high sampling rate
The I-T sampling rate index of SMU of FS-Pro is set at a minimum of 1e-6s (1us), and the data storage reaches 100,000 points, which has been verified in the industry at present.
CV Capacitor Voltage Test
The built-in CV frequency range is 10Hz ~ 10kHz, the minimum measurable capacitance is 20fF, and the DC bias voltage is 200V. External LCR provides two options: high precision (10fF @ 2MHz, built-in DC bias 40V) and high bandwidth (8MHz). At the same time, the software supports third-party industrial mainstream LCR, such as E4980A and 428x series.
1/f noise low frequency noise test
Bandwidth: 0.001 Hz-100KHz
Noise resolution: 2e-28A2/Hz
Measurement speed: < 10 seconds/bias (f > 0.5 Hz)
DUT Minimum Impedance: 500 Ohms
DUT DC Bias and Current: 200V, 1A
Pulse pulse generation function
The voltage range is 200V, the minimum pulse width is 50us, and the minimum resolution is 100nV
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