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X-ray photoelectron spectroscopy
 

 

1. Spectral performance improvement-higher sensitivity when using micro-focused scanning X-ray source for small area and large area analysis
 
2. New features! Large Area Imaging Analysis-Scanning X-Ray Image (SXI) Function Added Sample Station Drive Function for Large Area Analysis Navigation-Added Large Area Chemical State Image and Overlay Analysis Function
 
3. High Performance Depth Analysis-Multiple ion gun configurations for various organic, inorganic and mixed materials-Advanced thin film structure analysis software
 
4. Reliable automation and remote operation-Highly configurable sequential system to maximize the automation and efficiency of the analysis process-Full remote operation and remote diagnosis
 
5. More environmentally friendly and modern configuration-high efficiency, energy saving, fast vacuum acquisition and ergonomic design

 
 
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