1. Excellent operability
 
PHI X-tool software supports intuitive touch screen operation, and all XPS measurement processes can be completed on the touch screen. Users can freely choose manual operation mode and automatic operation mode (automatic qualitative, quantitative, analysis and report completion), and operators can easily cope with it regardless of whether they have rich XPS operation experience.
2. Automatic parameter setting and automatic report completion
 
PHI X-tool has Auto-Z function, which makes the analysis position on the focal plane of X-ray, and obtains the optimal analysis conditions. It can realize automatic matching of neutralization parameters, and can be easily dealt with regardless of the conductivity of samples.
 
Automatic characterization: realize automatic identification of spectral peaks
 
Automatic quantification: Automatic selection of spectral peak quantification range
 
 
Automatic curve fitting: It can automatically realize curve fitting under predetermined conditions
 
Automatically generate experimental reports
3. Multi-mode sample observation
 
In XPS analysis, sample observation, especially micro-location, is very important. PHI X-tool can observe samples in the following three ways: a. high spatial resolution image of injection chamber; b. Real-time CCD imaging; c. Secondary electron imaging (SXI). Using these methods to observe samples, the test position can be easily determined regardless of sample size and surface morphology.
 
4. Detailed condition setting and intuitive operation
 
According to the material and purpose, the analysis conditions can be set in detail. Through the built-in periodic table of elements, each photoelectron peak and Auger peak can be set. The narrow spectrum scanning parameters are set by changing the passing energy, step size and integration time. Customary file name and sample name can be set for each sample.
 
5. Rapid chemical imaging
 
Using scanning X-ray, high sensitivity detector and non-scanning mode, fast imaging analysis can be realized. All spectral data can be directly retrieved from each point. The spatial resolution, sensitivity and energy resolution of chemical imaging are consistent with the main indexes of the instrument.
6. Adopt the most advanced hardware design unique to PHI
 
Micro-focusing scanning X-ray source;
 
Double-beam neutralization system, automatic matching of low-energy ion beam and low-energy electron beam;
 
Floating ion gun, the ion acceleration voltage range can reach 0 ~ 5kV