Main features of PHI710:
 
· SEM resolution ≤ 3 nm, AES resolution ≤ 8 nm
 
In the process of collecting and analyzing Auger energy spectrum, including spectrogram, depth analysis and element distribution image, it is necessary to define the sample analysis area on SEM image first, which inevitably requires small and stable beam spot diameter.
Chemical state imaging of Auger energy spectrometer:
Atlas imaging
 
PHI710 can extract the relevant information of spectrogram from every pixel of Auger imaging analysis, and this function can realize chemical imaging.
 
Auger component image with high energy resolution
Nano-scale thin film analysis
· PHI SmartSoft-AES user interface:
 
PHI SmartSoft is a software designed to meet the needs of users. The software guides users to import samples, define analysis points and set analysis conditions in a task-oriented way, so that novices can test samples quickly and conveniently, and users can easily repeat previous measurements.
· PHI MultiPak data processing software:
 
MultiPak software has the most comprehensive Auger spectrum database. MultiPak can be used to process the data of spectrum analysis, line scanning analysis, imaging and depth analysis. The powerful functions of the software include the localization of spectral peaks, the extraction of chemical state information and detection limit, quantitative testing and image enhancement.