Excellent spatial resolution
 
Electron probe can achieve the highest level of secondary electron image resolution of 3nm (acceleration voltage 30kV), and the secondary electron resolution of No.1 under analysis conditions.
 
(20nm @ 10nA/50nm @ 100nA/150nm @ 1 μ A at 10kV acceleration voltage)
 
Ultra-high sensitivity analysis of large beam
 
The maximum beam current of 3.0 μ A (acceleration voltage 30kV) is realized. It can be used for surface analysis of ultra-trace elements with ultra-high sensitivity. And the objective lens diaphragm does not need to be replaced in the full beam range.
 
High performance X-ray spectrometer
 
Adhering to the superior 52.5 X-ray extraction angle of Shimadzu electron probe. The spectroscopic crystal with 4-inch Loran circle radius combines high sensitivity and high resolution. It can be equipped with 5-channel high-performance X-ray spectrometer at the same time. The analysis performance is better.
 
All analysis operations are simple and easy to understand
 
Advanced maneuverability that all operations can be carried out with only one mouse. Pursuing "easy-to-understand" humanized user interface. Equipped with navigation mode, automatic guidance until the report is generated.