Glow discharge spectrometer is a powerful means to decipher the coating process and analyze the coating structure. It can obtain the information of coating structure, interlayer diffusion, element enrichment, surface treatment, coating uniformity and so on through the change of elements, thus improving the process conditions and so on. The main application industries are metal metallurgy, semiconductor devices, LED chips, thin film solar cells, lithium battery yin and yang, optical glass, nuclear materials and so on.
 
 
Using pulsed RF light source, samples with poor thermal conductivity and thermal sensitivity can be effectively analyzed.
 
Using many techniques, such as high dynamic detector (HDD), which can measure the concentration range of ppm-100%, and the spectral resolution of Polyscan multi-channel scanning is 18pm ~ 25pm.
 
 
Fast analysis speed (2-10nm/s)