Main technical parameters:
 
1. X/Y axes are ultra-high performance linear motors with built-in magnetic mechanism and accurate positioning with 0.1 um grating ruler
 
2. Maximum C scan range: ≥ 430 x 430 mm
 
3. Scanning speed, maximum 1,500 mm/s-can be adjusted manually or automatically, with an average usable speed of 1,000 mm/s;
 
4. Mechanical repetition accuracy of XY axis ± 0.1 um
 
5. Z-axis movement range (stroke) 0-100mm;; And the software can set Z-axis safety distance Z-limit to avoid probe impact due to misoperation
 
Sample;
 
6. Autofocus: It not only has the function of surface autofocus, but also can automatically focus on any interface inside the sample; When the user needs to repeatedly detect the same
 
When a kind of sample is placed, even if the sample has a certain height error, the equipment can automatically focus to the set interface, and the operator does not need every
 
Recalibrate the focus position before the second scan, and only need to scan directly.
 
7. Main scanning modes: A-Scan (point scanning), B-Scan (longitudinal scanning), C-Scan (transverse scanning) and X-Scan (multilayer tomography)
 
C scan), multiple threshold scan, T-Scan (transmission scan)-option, High Quality-high definition scan, surface tracking scan, Z-Scan
 
Entity scanning mode (virtual regeneration scanning function), multi-area scanning including tray matrix scanning, Z transform scanning (detection scanning), and cis
 
Sequential scanning (sequential scanning), pre-scanning, automatic scanning, frequency division scanning, overlay scanning, interpolation scanning mode, etc.
 
8. Minimum image resolution: maximum 32,000 x 32,000 pixels, minimum accuracy 0.5 um pixels;
 
After inputting the scanning area and the resolution size of each pixel, the software automatically calculates the image resolution;
 
9. Quantitative measurement function:
 
X-Y length calculation; Thickness and distance measurement; Glue thickness measurement; It can be detected according to the actual profile of the sample (round, rectangular and irregular)
 
The quality of interface and welding interface is analyzed statistically. After scanning the sample, the scanning range can be selected by mouse and the defect size can be provided
 
List and output a report (which can display all hole size, area and other information, hole rate, maximum hole size, area and so on in the analysis area),
 
Click on any line in the list to display the X/Y area of the defect on the scanned image, which is convenient for further analysis and positioning of the defect; Surface flattening can be carried out
 
Integrity test, display the 3D topography map of the sample surface and calculate the height difference;