Double quartz tube: The diameter of outer tube is 100mm, and the diameter of suspended inner tube is 80. CVD reaction occurs when metal foil is wound on the outer surface of inner tube.
 
 
Vacuum sealing flange of double tube: Allow reaction gas to react between two tubes (10mm gap), and cooling gas is directly introduced into inner tube.
 
 
Four-channel mass flowmeter controls four channels of gas.
 
 
High-speed mechanical pump with KF25 quick connection and bellows. 
 
 
Slide rails are installed at the bottom of the furnace: the furnace can slide from one end to the other, thus realizing rapid heating and cooling.