
-Vertical feed grinding method, high-speed thinning of wafer by diamond grinding wheel -Compatible with 2-, 3-, 4-, 5-, 6-, 8-inch wafer thinning and grinding -One spindle can be equipped with coarse grinding wheel and fine grinding wheel -Automatic conversion between coarse grinding and fine grinding -Grinding wheel feed is controlled by high-precision servo motor, which has high grinding accuracy -The system adopts high precision balance system, which can compensate the jitter in the thinning process, and has good machining stability and high repeated machining accuracy -Totally enclosed grinding area -The grinding wheel is diamond or CBN -A variety of grinding wheels with different particle sizes and materials are used to grind different materials -High precision PLC controller -Ultra-low limit TTV -Multiple recipe programs can be set to run automatically -Various sizes of vacuum fixture -Configurable film thickness measurement module -Conversational man-machine PC interface, touch screen, easy to operate, can store multiple recipes
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