The main functions are:
 
Ion thinning is carried out on the inorganic sheet sample, so that the sheet sample can be passed through by transmission electrons, which is suitable for TEM transmission electron microscope observation; Ion beam polishing, ion beam etching, ion cleaning and slope cutting are performed on the inorganic bulk samples, which is convenient for SEM scanning electron microscope to observe the internal structure information of the samples.
 
* With two ion guns, the ion beam energy is 0.8 keV-10keV, and the relative position can be tilted at 45 degrees, the sample table tilt angle is-120 to 210 degrees, the ion beam processing angle is 0 to 90 degrees, the sample plane swing angle is less than 360 degrees, and the vertical swing distance is 5mm. The actual operation parameters are selected according to the specific application needs (the system has reference parameters, and can also set parameters and store them by itself)
* Optional sample table: TEM sample table (3.0 mm or 2.3 mm), FIB sample cleaning table, SEM sample table, ramp cutting sample table (35 ° or 90 ° ramp cutting of samples), etc
* Maximum size of SEM sample table: diameter 25mm, height 12mm
* All oil-free vacuum system, sample chamber with pre-pumping chamber, ensure sample exchange time < 1 minute
* Full computer control, touch screen operation interface, built-in video observation system, which can observe the sample processing process in real time