The hybrid piezoelectric ceramics/air-bearing active vibration isolation system has greatly improved the vibration isolation technology of the existing optical platform. Generally, the optical platform is supported by a low-frequency pneumatic vibration isolation system. Although it is very effective for high frequency isolation, the passive system actually amplifies vibration in the range of 1-3H2.

Active vibration isolation technology successfully overcomes these limitations by combining the patented technology of piezoelectric ceramic brake and inertial vibration sensor to eliminate rather than amplify low frequency vibration. Hybrid piezoelectric ceramics/air-bearing active vibration isolation system combines air-bearing and active vibration isolation technologies to form a complete vibration elimination system. Due to the series connection of the two isolation systems, the vibration isolation range of this technology ranges from very low frequencies to unprecedented high frequencies.

The air-bearing part at the top of the hybrid piezoelectric ceramic/air-bearing active vibration isolation system is modular and replaceable. It can be air-bearing isolation leg in air vibration isolation, or high damping vibration isolation air-bearing isolation leg, or even rigid leg, which depends on the actual application requirements.

Product characteristics:

Active vibration isolation technology is adopted

It is composed of two series vibration isolation systems, which can achieve the best vibration isolation effect

Active inertial vibration elimination system

Adopt high damping air vibration isolator

Vibration elimination starts below 1 Hz.

Simple, robust and cost-effective

Piezoelectric actuator with extended stroke, up to 60 microns.

Optional shelf for mounting equipment under the workbench

6 active degrees of freedom

DC-2020 digital controller including micro-nano optics