The Air Bearing Active Vibration Isolation System (Basic Model) is the first commercially available active vibration isolation system specifically designed to improve throughput resolution and satellite production in semiconductor manufacturing applications. It is a complete redesign of the original system, adding modularity, digital control, feedforward, high force/high gap actuators and multiple digital user interfaces specially designed for OEM applications such as microlithography, inspection and metering tools.

Product characteristics:

Six-degree-of-freedom active vibration reduction system

Contactless electronic height control

Digital controller

Feedforward input corrects payload motion caused by worktable

High-force electromagnetic actuators can be provided separately or integrated into the system

Reduce the stabilization time of payload motion and motion caused by worktable

Modular design allows users to specify a complete unit or component for OEM integration

Improve throughput, resolution and output

Automatically adjust feedforward parameters to reduce settings

The air-bearing active vibration isolation system (short type) is based on the precision electronic positioning system and improved. By adding a new digital controller, the air-bearing active vibration isolation system (short type) is easier to use, provides more functions, and has an improved user interface. It is a digital non-contact height control system for pneumatic vibration isolation system. This system usually includes a mechanical height valve and a mechanical height sensing connecting rod. Applications include semiconductor manufacturing equipment requiring improved setback times and increased output, and precision laboratory environments requiring optimum noise performance and platform stability.

Product characteristics:

Digital control, user-friendly LCD interface

Contactless Electropneumatic Height Control for Gimbal Piston ", CSP 8 and MaxDamp 8 Vibration Isolation Systems

Z-axis position reproducibility: 10 microns

Because the lever contact point of traditional mechanical height control system is eliminated, the vibration isolation effect is improved

The pneumatic feedforward function minimizes the response of Z axis to the motion of X-Y platform

It can be adjusted to quickly stabilize the motion caused by X-Y platform

The optional "VX" function integrates inertial sensors for active damping of vertical isolator resonance

Compatible with "soft dock station". Allows wafer loading/unloading without moving mounting

Commensurate electronic valves. "Switch" or conventional electronic valves do not generate impulse noise

Exhaust pipe is used for cleaning waste gas

Logical docking control and state