Ultra-precision manufacturing fields, such as microelectronics processing, are developing towards ultra-small and ultra-precision, which requires an ultra-clean high-speed precision positioning platform. Maglev platform combines electromagnetic levitation technology with linear drive technology, which has remarkable characteristics such as zero friction and zero transmission link.
Magnetic suspension vibration isolation is a new type of active vibration isolation method, which is supported by active controlled magnetic field between vibration source and structure, so that the vibration source and structure completely break away from mechanical contact and achieve the purpose of vibration isolation