The active piezoelectric ceramic vibration isolation platform base is an active piezoelectric ceramic vibration isolation platform developed by Micro-Nano Optics based on standard piezoelectric ceramic vibration isolation design, which is a self-defined and low-profile version. It makes the electron microscope closer to the ground, and it has the same ground vibration isolation performance as the standard active piezoelectric ceramic vibration elimination ground platform. Model WN01GZ-ZDP-JZ includes casters and is designed for vibration isolation of Thermo Fisher Scientific (formerly FEI) electron microscope products.
|
Active degree of freedom |
6 |
|
Active bandwidth |
0.6 Hz - 100 Hz |
|
Passive natural frequency |
The nominal value is 12Hz |
|
Effective active resonance frequency |
0.5Hz |
|
Vibration isolation at 1Hz |
40% - 70% |
|
Vibration isolation at 2Hz |
90% |
|
Vibration Isolation at > 3 Hz |
90 - 98% |
|
Internal noise |
<0.1 nm RMSd> |
|
Workload range |
Standard load-bearing capacity: 900-2,500 pounds (408-1,134 kg)
High load-bearing capacity: 2,500-3,200 pounds (1,134-1,452 kg) |
|
Magnetic field emission 4 inches |
<0.02uG broadband RMSd> | |
