Piezoelectric micrometer is an integrated piezoelectric positioning motion platform on the basis of hand-adjusted micrometer. The hand-adjusted micrometer can adjust the stroke of 13mm macroscopically, and the piezoelectric motion platform can adjust the stroke of 28 μ m or 110um nanometer microscopically. The adjustment accuracy of micrometer is within the adjustment range of piezoelectric motion platform, thus ensuring the convenience and accuracy of adjustment.
Characteristic
Motion in X direction, free combination from 1 to 3 dimensions
Hand-adjusted micrometer has a stroke of 13mm and a resolution of 10um
The piezoelectric fine adjustment stroke is 110um and the resolution is 2.5 nm
Piezoelectric adjustment with optional strain sensor
Application
Optical alignment
Cell manipulation
Precise Positioning of Focus Lens of CCD Camera
Microengineering/precision control.
|
Model
|
Tail dropout S-closed loop |
P83.X25S
P83.X25K |
P84.X100s
P84.×100K |
unit |
|
|
K-open loop with tail dropout |
|
|
Motion degree of freedom |
|
x |
x |
|
|
|
Travel range (coarse adjustment + fine adjustment) |
|
13mm+ 28μm |
13mm+110μm |
mm+μm |
|
|
Shell material |
|
Steel |
Steel, aluminium |
|
|
|
Manual adjustment part-micrometer |
|
|
Coarse adjustment travel range |
|
13 |
13 |
mm |
|
|
Coarse resolution |
|
10 |
10 |
um |
|
|
Driving mode |
|
Thread pair (fen Li card) |
Thread pair (fen Li card) |
|
|
|
Sensitivity |
|
<2 |
<2 |
um |
|
|
Minimum reading |
|
10 |
10 |
Micron/grid |
|
|
Pitch |
|
0.5 |
0.5 |
mm/rev. |
|
|
Piezoelectric actuation fine tuning part-piezoelectric actuation |
|
|
Fine adjustment of stroke range |
0~120 v |
20 |
80 |
um±20% |
|
|
-20~150V |
28 |
110 |
um±20% |
|
|
Sensor type |
SGS/- |
SGS/- |
|
|
Minimum step (resolution) |
1.5/0.5 |
7/2.5 |
nm, typ. |
|
Closed-loop linearity |
0.2/- |
0.1/- |
%F.S. |
|
Repeated positioning accuracy |
0.1/- |
0.05/- |
%F.S. |
|
Motion direction thrust |
20 |
16 |
N |
|
Stiffness in the direction of motion |
2 |
1 |
N/um±20% |
|
Bearing capacity (Z direction) |
500 |
500 |
g |
|
Operating temperature range |
-20~80 |
-20~80 |
℃ |
|
Electrostatic capacity |
1.8 |
1.8 |
uF±20% |
|
Outlet length |
1.5 |
1.5 |
m±10mm |
|
Sensor/voltage connector |
LEMO |
LEMO |
| |
