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Mini Stage:WN262TA20H
 

Travel Range

20mm

Resolution

0.125μm

Repeatability

＜1μm

Straightness

＜2μm

Parallelism

＜5μm

Pitching

10″（50μrad）

Yawing

10″（50μrad）

Maximum Speed

5mm/sec

Load Capacity

10kg

Weight

1.5kg

 

 
 
 
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