1) High resolution lithography to 1um level;
 
2) A variety of mask plates can be used, small size ~ 4 inches can be used; Again large size, you can customize the service.
 
3) Special base chuck can be customized;
 
4) A high-precision alignment table and a microscope manipulator;
 
5) High intensity optical devices for different ultraviolet exposures;
 
6) Air azimuth system for wedge compensation;
 
7) All parts are accessible;
 
8) Ergonomic operation;
 
9) Low cost and high quality;