
Product features:
Compact structure, small and light, ultra-thin
Manual automatic integrated inflation
Self-horizontal structure
Sensitive response, stable operation and pressure display
High strength aluminum alloy honeycomb structure mesa
Large bearing capacity
Applications:
Junction microscope, electron microscope
Roundness meter
Small optical equipment
Instruments and equipment with high requirements for vibration.
The table-type vibration isolation platform is designed and manufactured with hard aluminum alloy as a whole. The ultra-thin rubber air spring independently developed by Micro-Nano Optics is installed inside. The pneumatic control system adopts German FEST0 components. The table-type platform can be inflated by itself. There are two modes of inflation: one is automatic inflation and manual leveling, and the other is mechanical inflation and manual leveling; The panel is bonded with honeycomb aluminum plate, which has high stiffness and light weight.
Natural frequency |
Vertical: 1.5-3.0 Hz Horizontal: 1.5-3. OHz |
Vibration isolation mode |
Air spring vibration isolation rubber |
Leveling mode |
Automatic leveling |
Damping mode |
Multi-orifice air damping |
Work pressure |
0.2-0.4 MPa |
Platform size |
600mm x 500mm x 75mm 800mm x 600mm x 97mm |
Dead weight |
25kg, 10kg-50kg; 44kg, 20kg-100kg; |
Repeated positioning accuracy |
0.1 mm |
Flatness of platen |
≤0.1 mm/m2 |
Platen roughness |
≤0.8 um, surface matted | |